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J.W. MacKenty (STScI), S.B. Dutta (NASA/GSFC), NGST MMA Team
The near infrared spectrometer for the Next Generation Space Telescope will provide measurements of the earliest structures in the Universe. To meet its science goals, a large field of view, high efficiency, and a high degree of multiplex capability are required. During the mission formulation phase, we studied a multi-object spectrometer using a reflective slit mask realized by an array of individually articulated microscopic mirrors to achieve these goals. With NASA/NGST support, we are now developing a Micro Mirror Array specific to the spectrometer requirements as defined by NASA and the ESA design teams. Our approach provides a simple aluminum structure using electrostatic actuation for the mirror elements. This is constructed using MEMS techniques on top of a CMOS address circuit that provides a simple interface to the spectrometer and ease of operation. We have successfully demonstrated cryogenic operation of a variety of MEMS mirror structures, suitable CMOS circuits, and an integrated 32x32 MEMS/CMOS component. We will present a report on our progress and optical/mechanical characterization of the MMA components. This work is supported by NASA.