[12.15] Soft X-Ray Reflection Grating Technology Development for Constellation-X

AAS 207th Meeting, 8-12 January 2006
Session 12 Con-X Instruments and Optics
Poster, Monday, 9:20am-7:00pm, January 9, 2006, Exhibit Hall

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[12.15] Soft X-Ray Reflection Grating Technology Development for Constellation-X

R. K. Heilmann, M. Akilian, C.-H. Chang, J. C. Montoya, Y. Zhang, M. L. Schattenburg (MIT)

The Constellation-X mission design calls for a soft x-ray Reflection Grating Spectrometer (RGA) with light-weight reflection gratings placed in the converging beam of the Spectroscopy X-ray Telescope (SXT). Our early demonstration of high-efficiency saw-tooth reflection gratings for an in-plane diffraction geometry fabricated from off-cut anisotropically-etched silicon wafers was recently supplemented by the fabrication of high-efficiency gratings with parameters (grating period, blaze angle) suitable for an extreme off-plane mount. Patterning of large-area reflection gratings is efficiently done through Scanning Beam Interference Lithography (SBIL) on our so-called Nanoruler tool. Resolution goals require 2 arcsec or better flatness for 100-200 mm long and ~ 0.5 mm thick thin-foil grating substrates. We designed and built an ultra-low-stress thin-foil metrology truss that allowed us to surpass this flatness requirement in combination with flattening via Magnetorheological Finishing (MRF).

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